I inspect with a loupe, then use a series of increasingly invasive procedures trying to remove anything: 1) rocket blower 3-4 passes if needed, re-inspect, if particles still present, then 2) use a sensor brush to lightly sweep it away, 2-3 passes if needed, re-inspect, if its still there 3) a sensor pen (like a lens pen), and/or a "speck-grabber", and re-inspect then finally, if needed 4) wet cleaning.
sounds intensive, but realistically, its so rarely needed (MAYBE once a year, if even that frequently), and even when it is done, the rocket blower and/or brush remove practically everything. I can't remember the last time I had to actually do a wet cleaning.